Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850120 | Micromechanical component having a diaphragm | Uwe Schiller, Volkmar Senz, Helmut Grutzeck, Michaela Mitschke | 2017-12-26 |
| 9816953 | Micromechanical moisture sensor device, corresponding manufacturing method, and micromechanical sensor system | Uwe Schiller | 2017-11-14 |
| 9739998 | Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly | Joerg Muchow, Helmut Grutzeck, Zoltan Lestyan | 2017-08-22 |
| 9725311 | Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting | Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Andreas Duell +3 more | 2017-08-08 |