Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850120 | Micromechanical component having a diaphragm | Uwe Schiller, Volkmar Senz, Jochen Franz, Helmut Grutzeck | 2017-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850120 | Micromechanical component having a diaphragm | Uwe Schiller, Volkmar Senz, Jochen Franz, Helmut Grutzeck | 2017-12-26 |