Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850120 | Micromechanical component having a diaphragm | Volkmar Senz, Jochen Franz, Helmut Grutzeck, Michaela Mitschke | 2017-12-26 |
| 9816953 | Micromechanical moisture sensor device, corresponding manufacturing method, and micromechanical sensor system | Jochen Franz | 2017-11-14 |