Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850120 | Micromechanical component having a diaphragm | Uwe Schiller, Volkmar Senz, Jochen Franz, Michaela Mitschke | 2017-12-26 |
| 9764945 | Micromechanical component and corresponding test method for a micromechanical component | Sebastian Reiss, Simon Armbruster, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader +2 more | 2017-09-19 |
| 9739998 | Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly | Joerg Muchow, Jochen Franz, Zoltan Lestyan | 2017-08-22 |
| 9725311 | Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting | Jochen Franz, Simon Armbruster, Joerg Muchow, Frederic Njikam Njimonzie, Andreas Duell +3 more | 2017-08-08 |
| 9618740 | Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device | Simon Armbruster, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader, Stefan Pinter +2 more | 2017-04-11 |