Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9739998 | Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly | Joerg Muchow, Helmut Grutzeck, Jochen Franz | 2017-08-22 |
| 9618740 | Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device | Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader +2 more | 2017-04-11 |