Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2017-12-19 |
| 9778580 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2017-10-03 |
| 9766555 | Exposure apparatus, exposure method, and method for producing device | Yasufumi Nishii | 2017-09-19 |
| 9746781 | Exposure apparatus and method for producing device | Hirotaka Kohno, Takeshi Okuyama, Katsushi Nakano | 2017-08-29 |
| 9599907 | Exposure apparatus and device manufacturing method | Hirotaka Kohno, Yasufumi Nishii | 2017-03-21 |
| 9588436 | Exposure apparatus, exposure method, and device producing method | — | 2017-03-07 |