Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2017-12-19 |
| 9651871 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Yoji Watanabe, Tomoharu Fujiwara | 2017-05-16 |
| 9551942 | Controller for optical device, exposure method and apparatus, and method for manufacturing device | — | 2017-01-24 |