Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9651871 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Soichi Owa, Tomoharu Fujiwara | 2017-05-16 |
| 9638124 | Control device for engine | Toru Takeyoshi, Keisuke Agusa | 2017-05-02 |
| 9613671 | Nonvolatile random access memory including control circuit configured to receive commands at high and low edges of one clock cycle | Yutaka Shirai, Naoki Shimizu, Kenji Tsuchida, Ji-Hyae Bae, Yong Ho Kim | 2017-04-04 |
| 9599906 | Method for driving spatial light modulator, method for forming pattern for exposure, exposure method, and exposure apparatus | — | 2017-03-21 |