Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709900 | Exposure apparatus and device fabricating method | Yuichi Shibazaki | 2017-07-18 |
| 9651871 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Soichi Owa, Yoji Watanabe | 2017-05-16 |
| 9618854 | Exposure method, exposure apparatus, and device manufacturing method | Kenichi Shiraishi, Ryuichi Hoshika | 2017-04-11 |
| 9568826 | Mark formation method and device manufacturing method | — | 2017-02-14 |