| 9846374 |
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method |
— |
2017-12-19 |
| 9835958 |
Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method |
— |
2017-12-05 |
| 9810999 |
Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium |
— |
2017-11-07 |
| 9760021 |
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method |
— |
2017-09-12 |
| 9740114 |
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method |
— |
2017-08-22 |
| 9715176 |
Exposure apparatus, exposure method, and device manufacturing method |
— |
2017-07-25 |
| 9709900 |
Exposure apparatus and device fabricating method |
Tomoharu Fujiwara |
2017-07-18 |
| 9690205 |
Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method |
— |
2017-06-27 |
| 9690214 |
Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method |
— |
2017-06-27 |
| 9690209 |
Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method |
— |
2017-06-27 |
| 9684248 |
Lithographic apparatus having substrate table and sensor table to measure a patterned beam |
— |
2017-06-20 |
| 9678433 |
Exposure apparatus and exposure method, and device manufacturing method |
— |
2017-06-13 |
| 9665016 |
Lithographic apparatus and method having substrate table and sensor table to hold immersion liquid |
— |
2017-05-30 |
| 9632431 |
Lithographic apparatus and method having substrate and sensor tables |
— |
2017-04-25 |
| 9625834 |
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method |
— |
2017-04-18 |
| 9612539 |
Movable body drive method, pattern formation method, exposure method, and device manufacturing method for maintaining position coordinate before and after switching encoder head |
— |
2017-04-04 |
| 9594313 |
Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method |
— |
2017-03-14 |
| 9588443 |
Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method |
— |
2017-03-07 |
| 9575417 |
Exposure apparatus including a mask holding device which holds a periphery area of a pattern area of the mask from above |
— |
2017-02-21 |
| 9568844 |
Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method |
— |
2017-02-14 |
| 9563116 |
Mask, exposure apparatus and device manufacturing method |
— |
2017-02-07 |
| 9557656 |
Stage apparatus and exposure apparatus |
— |
2017-01-31 |
| 9535339 |
Exposure apparatus, exposure method, and device manufacturing method |
— |
2017-01-03 |