Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2017-12-19 |
| 9678437 | Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction | Takehito Kudo | 2017-06-13 |