Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2017-12-19 |
| 9798245 | Exposure apparatus, and exposure method, with recovery device to recover liquid leaked from between substrate and member | Kenichi Shiraishi, Hirotaka Kohno | 2017-10-24 |
| 9766555 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka | 2017-09-19 |
| 9599907 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Hirotaka Kohno | 2017-03-21 |