Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9746781 | Exposure apparatus and method for producing device | Hirotaka Kohno, Takeshi Okuyama, Hiroyuki Nagasaka | 2017-08-29 |
| 9720332 | Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium | Mineyuki Nishino, Satoshi Takahashi | 2017-08-01 |