Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9752254 | Method for manufacturing a single-crystal 4H—SiC substrate | Akihito Ohno, Zempei Kawazu, Nobuyuki Tomita, Takanori Tanaka, Kenichi Hamano | 2017-09-05 |
| 9564315 | Manufacturing method and apparatus for manufacturing silicon carbide epitaxial wafer | Akihito Ohno, Masashi Sakai, Takahiro Yamamoto, Yasuhiro Kimura, Takuma Mizobe +1 more | 2017-02-07 |