Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824911 | Substrate support and semiconductor manufacturing apparatus | Akihito Ohno | 2017-11-21 |
| 9752254 | Method for manufacturing a single-crystal 4H—SiC substrate | Akihito Ohno, Nobuyuki Tomita, Takanori Tanaka, Yoichiro Mitani, Kenichi Hamano | 2017-09-05 |