Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824911 | Substrate support and semiconductor manufacturing apparatus | Zempei Kawazu | 2017-11-21 |
| 9752254 | Method for manufacturing a single-crystal 4H—SiC substrate | Zempei Kawazu, Nobuyuki Tomita, Takanori Tanaka, Yoichiro Mitani, Kenichi Hamano | 2017-09-05 |
| 9564315 | Manufacturing method and apparatus for manufacturing silicon carbide epitaxial wafer | Masashi Sakai, Yoichiro Mitani, Takahiro Yamamoto, Yasuhiro Kimura, Takuma Mizobe +1 more | 2017-02-07 |