Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9564315 | Manufacturing method and apparatus for manufacturing silicon carbide epitaxial wafer | Akihito Ohno, Masashi Sakai, Yoichiro Mitani, Takahiro Yamamoto, Takuma Mizobe +1 more | 2017-02-07 |