Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9678143 | Semiconductor evaluation apparatus | Akira Okada, Takaya Noguchi, Norihiro Takesako, Kinya YAMASHITA | 2017-06-13 |
| 9659795 | Foreign matter removal device and foreign matter removal method | Akira Okada, Takaya Noguchi | 2017-05-23 |
| 9551745 | Semiconductor device assessment apparatus | Akira Okada, Kinya YAMASHITA | 2017-01-24 |