Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9668373 | Substrate support chuck cooling for deposition chamber | Brian T. West, Vijay D. Parkhe, Dan DEYO | 2017-05-30 |
| 9613846 | Pad design for electrostatic chuck surface | Govinda Raj, Cheng-Hsiung Tsai, Kadthala Ramaya Narendrnath, Manjunatha Koppa, Ross Marshall | 2017-04-04 |