Issued Patents 2017
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852924 | Line edge roughness improvement with sidewall sputtering | Zhongkui Tan, Hua Xiang, Yiting Zhang, Qing Xu | 2017-12-26 |
| 9824896 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Ying Wu, Qing Xu, John Drewery | 2017-11-21 |
| 9767991 | Methods and systems for independent control of radical density, ion density, and ion energy in pulsed plasma semiconductor device fabrication | Zhongkui Tan, Ying Wu, Qing Xu | 2017-09-19 |
| 9761459 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Alex Paterson, John Drewery | 2017-09-12 |
| 9741563 | Hybrid stair-step etch | Hua Xiang, Indeog Bae, Sung Jin Jung, Ce Qin, Yoko Yamaguchi | 2017-08-22 |
| RE46464 | Method for forming stair-step structures | Ce Qin, Hyun-Yong YU | 2017-07-04 |
| 9691625 | Methods and systems for plasma etching using bi-modal process gas composition responsive to plasma power level | Zhongkui Tan, Ying Wu, Qing Xu | 2017-06-27 |
| 9673057 | Method for forming stair-step structures | In Deog BAE | 2017-06-06 |
| 9646844 | Method for forming stair-step structures | Hyun-Yong YU | 2017-05-09 |
| 9633867 | Method and apparatus for anisotropic tungsten etching | Zhongkui Tan, Huai-Yu Hsiao | 2017-04-25 |
| 9607848 | Etch process with pre-etch transient conditioning | Wonchul Lee, John Drewery | 2017-03-28 |
| 9583357 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Alex Paterson, John Drewery | 2017-02-28 |