Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823590 | Lithographic apparatus and device manufacturing method | Carlo Cornelis Maria Luijten, Franciscus Johannes Joseph Janssen, Maksym Chernyshov | 2017-11-21 |
| 9735035 | Methods and apparatuses for estimating on-wafer oxide layer reduction effectiveness via color sensing | Cian Sweeney, Shantinath Ghongadi | 2017-08-15 |
| 9625835 | Lithographic apparatus and device manufacturing method | Carlo Cornelis Maria Luijten, Franciscus Johannes Joseph Janssen, Maksym Chernyshov | 2017-04-18 |
| 9587322 | Wetting wave front control for reduced air entrapment during wafer entry into electroplating bath | Shantinath Ghongadi, Frederick Dean Wilmot, Douglas Hill, Bryan L. Buckalew | 2017-03-07 |