Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828672 | Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma | Bhadri N. Varadarajan, Bo Gong, Rachel E. Batzer, Bart J. van Schravendijk, Geoffrey Hohn | 2017-11-28 |
| 9591738 | Plasma generator systems and methods of forming plasma | David Cheung, Prashanth Kothnur | 2017-03-07 |