Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768052 | Minimal contact edge ring for rapid thermal processing | Kevin Joseph Bautista | 2017-09-19 |
| 9728401 | Methods for conformal treatment of dielectric films with low thermal budget | Matthew S. Rogers, Christopher S. Olsen | 2017-08-08 |
| 9716972 | System, method and device to interrogate for the presence of objects | James D. Logan, Michael A. Form, Charles G. Call, Teeporn Paul Tanpitukpongse, Jeffrey Logan +1 more | 2017-07-25 |
| 9558982 | Minimal contact edge ring for rapid thermal processing | Sairaju Tallavarjula, Kevin Joseph Bautista, Jeffrey Tobin | 2017-01-31 |