Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9719932 | Confined illumination for small spot size metrology | Michael S. Bakeman, Guorong V. Zhuang, Andrei V. Shchegrov, Leonid Poslavsky | 2017-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9719932 | Confined illumination for small spot size metrology | Michael S. Bakeman, Guorong V. Zhuang, Andrei V. Shchegrov, Leonid Poslavsky | 2017-08-01 |