Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766557 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro +5 more | 2017-09-19 |
| 9740112 | Patterning device support and lithographic apparatus | Arindam Sinharoy, Stephen Roux, Jean-Philippe Xavier Van Damme, Mark Josef Schuster, Duncan G. Harris +1 more | 2017-08-22 |
| 9632433 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro +5 more | 2017-04-25 |
| 9632434 | Reticle cooling system in a lithographic apparatus | Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro +6 more | 2017-04-25 |