Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740112 | Patterning device support and lithographic apparatus | Arindam Sinharoy, Jean-Philippe Xavier Van Damme, Daniel Nathan Burbank, Mark Josef Schuster, Duncan G. Harris +1 more | 2017-08-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740112 | Patterning device support and lithographic apparatus | Arindam Sinharoy, Jean-Philippe Xavier Van Damme, Daniel Nathan Burbank, Mark Josef Schuster, Duncan G. Harris +1 more | 2017-08-22 |