Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740112 | Patterning device support and lithographic apparatus | Arindam Sinharoy, Stephen Roux, Daniel Nathan Burbank, Mark Josef Schuster, Duncan G. Harris +1 more | 2017-08-22 |