Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741593 | Thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky | 2017-08-22 |
| 9691645 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky, Ananda Seelavanth Math, Saravanakumar Natarajan, Shubham Chourey | 2017-06-27 |
| 9540736 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang +1 more | 2017-01-10 |