Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9649592 | Plasma abatement of compounds containing heavy atoms | Michael S. Cox, Monique McIntosh, Paul Fisher, Yutaka Tanaka, Zheng Yuan | 2017-05-16 |
| 9597634 | Methods and apparatus for treating exhaust gas in a processing system | Mehran Moalem, Daniel O. Clark | 2017-03-21 |
| 9552967 | Abatement system having a plasma source | Michael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson | 2017-01-24 |
| 9543124 | Capacitively coupled plasma source for abating compounds produced in semiconductor processes | Michael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson | 2017-01-10 |