Issued Patents 2017
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9809450 | CMOS-MEMS integration using metal silicide formation | Jong Il Shin, Peter Smeys | 2017-11-07 |
| 9772738 | Mobile terminal having a screen operation and operation method thereof | Minwook Na, Kangsik Choi, Minsoo Kwon, Jeeyeun Wang | 2017-09-26 |
| 9761557 | CMOS-MEMS integration by sequential bonding method | Jong Il Shin, Peter Smeys | 2017-09-12 |
| 9738511 | Reduction of chipping damage to MEMS structure | Kirt Williams, Cerina Zhang, Kuolung Lei | 2017-08-22 |
| 9738512 | CMOS-MEMS integrated device including multiple cavities at different controlled pressures and methods of manufacture | Daesung Lee, Jong Il Shin, Peter Smeys, Martin Lim | 2017-08-22 |
| 9731963 | Method of increasing MEMS enclosure pressure using outgassing material | Cerina Zhang, Martin Lim, Joseph Seeger | 2017-08-15 |
| 9718680 | CMOS-MEMS integrated device including a contact layer and methods of manufacture | Daesung Lee, Jong Il Shin, Peter Smeys | 2017-08-01 |
| 9663349 | MEMS device with electrodes permeable to outgassing species | Houri Johari-Galle, Martin Lim, Joseph Seeger | 2017-05-30 |
| 9611133 | Film induced interface roughening and method of producing the same | Fang Liu, Martin Lim, Jong Il Shin | 2017-04-04 |
| 9540228 | MEMS-CMOS device that minimizes outgassing and methods of manufacture | Peter Smeys, Jong Il Shin | 2017-01-10 |