Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9738511 | Reduction of chipping damage to MEMS structure | Jongwoo Shin, Kirt Williams, Kuolung Lei | 2017-08-22 |
| 9731963 | Method of increasing MEMS enclosure pressure using outgassing material | Martin Lim, Jongwoo Shin, Joseph Seeger | 2017-08-15 |
| 9650241 | Method for providing a MEMS device with a plurality of sealed enclosures having uneven standoff structures and MEMS device thereof | Martin Lim | 2017-05-16 |