Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9676614 | MEMS device with stress relief structures | Michael Judy | 2017-06-13 |
| 9663349 | MEMS device with electrodes permeable to outgassing species | Jongwoo Shin, Martin Lim, Joseph Seeger | 2017-05-30 |