Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842805 | Drive-in Mn before copper plating | Chih-Chao Yang | 2017-12-12 |
| 9716038 | Critical dimension shrink through selective metal growth on metal hardmask sidewalls | Hong He, Juntao Li, Chih-Chao Yang, Yunpeng Yin | 2017-07-25 |
| 9653571 | Freestanding spacer having sub-lithographic lateral dimension and method of forming same | Su Chen Fan, Dong-Kwon Kim, Sean Lian, Fee Li Lie, Linus Jang | 2017-05-16 |
| 9595473 | Critical dimension shrink through selective metal growth on metal hardmask sidewalls | Hong He, Juntao Li, Chih-Chao Yang, Yunpeng Yin | 2017-03-14 |
| 9576901 | Contact area structure and method for manufacturing the same | Su Chen Fan, Chih-Chao Yang | 2017-02-21 |
| 9553044 | Electrically conductive interconnect including via having increased contact surface area | James J. Demarest, Sean Teehan, Chih-Chao Yang | 2017-01-24 |