Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831062 | Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device | Makoto Suzuki, Satoru Yamaguchi, Kei Sakai, Satoshi Takada, Kazuhisa Hasumi +1 more | 2017-11-28 |
| 9804107 | Pattern measurement device and computer program for evaluating patterns based on centroids of the patterns | Akiyuki Sugiyama, Satoru Yamaguchi, Motonobu Hommi | 2017-10-31 |
| 9627171 | Charged particle beam device | Hiroshi Makino, Hideyuki Kazumi, Minoru Yamazaki, Yuzuru Mizuhara | 2017-04-18 |
| 9589343 | Pattern measurement device, evaluation method of polymer compounds used in self-assembly lithography, and computer program | Kei Sakai, Norio Hasegawa | 2017-03-07 |