Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9640366 | Electron beam irradiation method and scanning electron microscope | Toshiyuki Yokosuka, Hideyuki Kazumi, Kazutami Tago | 2017-05-02 |
| 9627171 | Charged particle beam device | Hiroshi Makino, Hideyuki Kazumi, Yuzuru Mizuhara, Miki Isawa | 2017-04-18 |