Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589343 | Pattern measurement device, evaluation method of polymer compounds used in self-assembly lithography, and computer program | Miki Isawa, Kei Sakai | 2017-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589343 | Pattern measurement device, evaluation method of polymer compounds used in self-assembly lithography, and computer program | Miki Isawa, Kei Sakai | 2017-03-07 |