Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831062 | Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device | Makoto Suzuki, Satoru Yamaguchi, Miki Isawa, Satoshi Takada, Kazuhisa Hasumi +1 more | 2017-11-28 |
| 9799903 | Electrocatalyst for solid polymer fuel cell | Hiroshi Iden, Atsushi Ohma, Kazuyuki Satou, Yoshitaka Ono, Hiroyuki Tanaka +1 more | 2017-10-24 |
| 9589343 | Pattern measurement device, evaluation method of polymer compounds used in self-assembly lithography, and computer program | Miki Isawa, Norio Hasegawa | 2017-03-07 |