Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9718234 | Imprint lithography apparatus and device manufacturing method therefor | Hironori Maeda, Seiya Miura, Ken Minoda | 2017-08-01 |
| 9645514 | Imprint apparatus, imprint method, and device manufacturing method | Hironori Maeda, Seiya Miura, Ken Minoda | 2017-05-09 |
| 9606456 | Lithography apparatus, determination method, and method of manufacturing article | Masahiro Ogura, Kazushi Mizumoto | 2017-03-28 |
| 9594315 | Detection apparatus, lithography apparatus and method of manufacturing article | Takafumi Miyaharu | 2017-03-14 |
| 9595447 | Detection apparatus, imprint apparatus, and method of manufacturing products | Hiroshi Inada, Takafumi Miyaharu | 2017-03-14 |