Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9718234 | Imprint lithography apparatus and device manufacturing method therefor | Hironori Maeda, Seiya Miura, Kazuhiko Mishima | 2017-08-01 |
| 9645514 | Imprint apparatus, imprint method, and device manufacturing method | Hironori Maeda, Seiya Miura, Kazuhiko Mishima | 2017-05-09 |