Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9718234 | Imprint lithography apparatus and device manufacturing method therefor | Hironori Maeda, Kazuhiko Mishima, Ken Minoda | 2017-08-01 |
| 9645514 | Imprint apparatus, imprint method, and device manufacturing method | Hironori Maeda, Kazuhiko Mishima, Ken Minoda | 2017-05-09 |
| 9564374 | Forming method and method of manufacturing article | Masaki Mizutani, Kenichiro Mori | 2017-02-07 |