Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606456 | Lithography apparatus, determination method, and method of manufacturing article | Masahiro Ogura, Kazuhiko Mishima | 2017-03-28 |
| 9557659 | Lithography apparatus, determination method, and method of manufacturing article | — | 2017-01-31 |