Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9594315 | Detection apparatus, lithography apparatus and method of manufacturing article | Kazuhiko Mishima | 2017-03-14 |
| 9595447 | Detection apparatus, imprint apparatus, and method of manufacturing products | Hiroshi Inada, Kazuhiko Mishima | 2017-03-14 |