Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460942 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Tsunenaga Nakashima | 2016-10-04 |
| 9460947 | Coating and developing apparatus and method, and storage medium | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi | 2016-10-04 |
| 9417529 | Coating and developing apparatus and method | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi, Hiroshi Tomita, Makoto Hayakawa +1 more | 2016-08-16 |
| 9299599 | Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position | Yuichi Douki, Tokutarou Hayashi, Naruaki Iida | 2016-03-29 |
| 9287145 | Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Tsunenaga Nakashima | 2016-03-15 |