Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460947 | Coating and developing apparatus and method, and storage medium | Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2016-10-04 |
| 9417529 | Coating and developing apparatus and method | Akira Miyata, Shinichi Hayashi, Suguru Enokida, Hiroshi Tomita, Makoto Hayakawa +1 more | 2016-08-16 |