Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507349 | Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium | Tokutarou Hayashi, Hiromitsu Maejima | 2016-11-29 |
| 9299599 | Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position | Tokutarou Hayashi, Naruaki Iida, Suguru Enokida | 2016-03-29 |