Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507349 | Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium | Yuichi Douki, Hiromitsu Maejima | 2016-11-29 |
| 9299599 | Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position | Yuichi Douki, Naruaki Iida, Suguru Enokida | 2016-03-29 |
| 9268327 | Substrate processing apparatus and substrate processing method | Akihiro Teramoto | 2016-02-23 |
| 9240337 | Substrate transport method, substrate transport apparatus, and coating and developing system | — | 2016-01-19 |