Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507349 | Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium | Tokutarou Hayashi, Yuichi Douki | 2016-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507349 | Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium | Tokutarou Hayashi, Yuichi Douki | 2016-11-29 |