Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460942 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Tsunenaga Nakashima | 2016-10-04 |
| 9287145 | Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium | Masahiro Nakaharada, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Tsunenaga Nakashima | 2016-03-15 |