Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530626 | Method and apparatus for ESC charge control for wafer clamping | Jason Marion, Sonam D. Sherpa, Sergey Voronin, Yoshio Ishikawa, Takashi Enomoto | 2016-12-27 |
| 9530667 | Method for roughness improvement and selectivity enhancement during arc layer etch using carbon | Vinayak Rastogi | 2016-12-27 |
| 9378975 | Etching method to form spacers having multiple film layers | Blake Parkinson | 2016-06-28 |
| 9318343 | Method to improve etch selectivity during silicon nitride spacer etch | Blake Parkinson | 2016-04-19 |