Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530626 | Method and apparatus for ESC charge control for wafer clamping | Jason Marion, Sonam D. Sherpa, Sergey Voronin, Alok Ranjan, Yoshio Ishikawa | 2016-12-27 |
| 9436216 | Information processing apparatus | Shuhei Yukawa, Masayoshi Koganei, Toshiyuki Sasaki | 2016-09-06 |
| 9297385 | Vortex prevention device and double suction vertical pump having such vortex prevention device | Takashi Yamanaka, Dai Kudo, Shuichiro Honda | 2016-03-29 |